专利名称：Capacitor for an integrated circuit发明人：Larry Bruce Fritzinger,Nace Layadi,Sailesh
Mansinh Merchant,Pradip Kumar Roy
申请号：US09250500申请日：19990216公开号：US06720604B1公开日：20040413
专利附图：
摘要：The present invention provides a capacitor comprising a conductive plugcomprising a top surface and exposed sidewalls, wherein the sidewalls comprise a layerselected from the group consisting of titanium and titanium nitride, and an electrode
material layer over the conductive plug sidewalls, wherein the layer of electrode materialis not titanium nor titanium nitride.
申请人：AGERE SYSTEMS INC.
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