Appearance inspection method and appearance inspec

专利名称：Appearance inspection method and

appearance inspection apparatus having highinspection processing speed

发明人：Yoshihiro Sasaki,Masahiko Nagao申请号：US09825947申请日：20010405公开号：US06741734B2公开日：20040525

专利附图：

摘要：An appearance inspection method, includes (a), (b), (c), (d), (e), (f), (g), and (h). The(a) includes providing an image data in which an inspected sample is photographed. The

(b) includes detecting a brightness of each of a plurality of image units included in theimage data based on the image data. The (c) includes detecting the number of the imageunits being identical with each other in the brightness for each of the brightness. The (d)includes detecting, as a measured maximum number, the number that is maximum of thedetected numbers as a result of the (c). The (e) includes computing the measuredmaximum number to determine a set maximum number. The (f) includes determining athreshold level of the brightness based on the set maximum number. The (g) includesconverting the image data into a binary pattern based on the threshold level. The (h)includes detecting a defect of the inspected sample based on the binary pattern.

申请人：NEC CORPORATION

代理机构：Sughrue Mion, PLLC

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