Apparatus and method for measurement of fields of

专利名称：Apparatus and method for measurement of

fields of backscattered and forwardscattered/reflected beams by an object ininterferometry

发明人：Henry Allen Hill申请号：US10816172申请日：20040401公开号：US070838B2公开日：20060620

专利附图：

摘要：An interferometry system including an interferometer that includes a source

imaging system that focuses an input beam onto a spot on or in the object and an objectimaging system that images the spot onto a detector element as an interference beam,wherein the source imaging system is characterized by a first aperture stop that defines afirst aperture and includes a first phase shifter that introduces a first phase shift in lightpassing through a first region of the first aperture relative to light passing through asecond region of the first aperture, and wherein the object imaging system is

characterized by a second aperture stop that defines a second aperture and includes asecond phase shifter that introduces a second phase shift in light passing through a firstregion of the second aperture relative to light passing through a second region of thesecond aperture.

申请人：Henry Allen Hill

地址：Tucson AZ US

国籍：US

代理机构：Wilmer Cutler Pickering Hale and Dorr LLP

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