Microscope, especially microscope used for inspect

专利名称：Microscope, especially microscope used for

inspection in semiconductor manufacture

发明人：Thomas Engel,Wolfgang Harnisch,Roland

Scheler

申请号：US10875934申请日：20040624

公开号：US20040246574A1公开日：20041209

专利附图：

摘要：A microscope, especially a microscope that is used for inspection in

semiconductor manufacture is disclosed. The microscope comprises a pulsed laser for

the purpose of illumination, preferably in the UV range. At least one rotating diffusiondisk is disposed downstream of the laser so as to homogenize the illumination.

Preferably, two rotating diffusion disks of opposite rotational sense are disposed in theillumination beam path either directly or indirectly one behind the other.

申请人：ENGEL THOMAS,HARNISCH WOLFGANG,SCHELER ROLAND

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