专利名称：Microscope, especially microscope used for
inspection in semiconductor manufacture
发明人：Thomas Engel,Wolfgang Harnisch,Roland
Scheler
申请号：US10875934申请日：20040624公开号：US07167310B2公开日：20070123
专利附图：
摘要：A microscope, especially a microscope that is used for inspection in
semiconductor manufacture is disclosed. The microscope comprises a pulsed laser for
the purpose of illumination, preferably in the UV range. At least one rotating diffusiondisk is disposed downstream of the laser so as to homogenize the illumination.
Preferably, two rotating diffusion disks of opposite rotational sense are disposed in theillumination beam path either directly or indirectly one behind the other.
申请人：Thomas Engel,Wolfgang Harnisch,Roland Scheler
地址：Erfurt-Niedemissa DE,Lehesten DE,Jena DE
国籍：DE,DE,DE
代理机构：Reed Smith LLP
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