专利名称：Method and apparatus for forming coating
film
发明人：Akio Oku,Yorikazu Sakamoto申请号：US10901412申请日：20040729
公开号：US20050058775A1公开日：20050317
专利附图：
摘要：A method of forming a coating film includes rotating a support member torotate a target substrate in a horizontal state, and supplying a coating liquid onto atarget surface from a supply port of a nozzle, while moving the nozzle in a horizontal
direction relative to the target substrate being rotated. This method also includesdetecting a height of the target surface, and controlling a vertical position of the nozzle,based on a detected height of the target surface, to satisfy a formula, (S/R)>D>0, whensupplying the coating liquid. In the formula, S denotes an area of the supply port, Rdenotes an inner perimeter of the supply port, and D denotes a distance between thesupply port and the target surface.
申请人：Akio Oku,Yorikazu Sakamoto
地址：Kitakyushu-shi JP,Kitakyushu-shi JP
国籍：JP,JP
更多信息请下载全文后查看
因篇幅问题不能全部显示，请点此查看更多更全内容