专利名称：STORAGE AND DELIVERY SYSTEM FOR
GASEOUS COMPOUNDS
发明人：TOM, Glenn, M.,MCMANUS, James, V.申请号：EP95936302.9申请日：19951013公开号：EP0785817B1公开日：20000830
摘要：An adsorption-desorption apparatus (102), and process for storage anddispensing of a gas, e.g., hydride and halide gases, and organometallic Group Vcompounds, which is selectively dispensed by pressure differential desorption of thesorbate gas from the sorbent material. The sorbent material is preferably a materialwhich is devoid of concentration of trace components such as water, metals and oxidictransition metal species which would significantly decompose the sorbate gas inapparatus (102).
申请人：ADVANCED TECH MATERIALS
地址：US
国籍：US
代理机构：Gee, Steven William
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