专利名称：NANO-IMPRINTING TEMPLATE, SYSTEM,
AND IMPRINTING METHOD
发明人：Xing Cheng,Dehu Cui,Ziping Li,Jing
Ming,Zhong Zhang
申请号：US15117046申请日：20140305
公开号：US20170176853A1公开日：20170622
专利附图：
摘要：A nano-imprinting template, a system, and an imprinting method are provided.The nano-imprinting template () comprises: a first baseplate () transparent to ultravioletlight; an imprinting pattern structure () formed on the first surface of the first baseplate(); a heating element () formed on the second surface, opposite to the first surface, of thefirst baseplate (), wherein the heating element () is transparent to ultraviolet light; and afirst electrode pair () formed on the second surface and used for supplying a currentapplied by an external power supply to the heating element () so as to make the heatingpart () generate heat. The nano-imprinting template () and the system seamlessly
integrate an ultraviolet curing nano-imprinting technology with a thermoplastic nano-imprinting technology, which have the advantages of small size of equipment, low cost,simple process and the like. When the template and the system are used to carry outthermoplastic nano-imprinting, a large area of micro-nano patterns can be copied. Inaddition, when the template and the system are used to carry out UV curing nano-imprinting, the purposes of improving the process throughput and reducing the patternreplication defects are achieved.
申请人：SOUTH UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA
地址：Shenzhen, Guangdong CN
国籍：CN
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