Use of an optical device for interferometric analy

专利名称：Use of an optical device for interferometric

analysis of the surface condition of an object

发明人：Joël Chevrier,Serge Huant,Wilfrid

Schwartz,Alessandro Siria

申请号：US13142815申请日：20091229公开号：US08792104B2公开日：20140729

专利附图：

摘要：The instant disclosure describes an optical device for the interferometricanalysis of the surface condition of an object, including: a light source; an optical fiber

capable of receiving the incident light wave and transmitting said wave to the object; adetector capable of detecting a combination between a light wave reflected by theoptical fiber and a light wave returned by the object; and in which the optical fiber has afree end in the shape of a cone, with a vertex angle of between 15 and 25 degrees, the tipof the cone having dimensions of less than 50×50 nm, and the tip of the cone beingplaced, while in use, at a distance of between 5 and 50 μm from the surface of the object.

申请人：Joël Chevrier,Serge Huant,Wilfrid Schwartz,Alessandro Siria

地址：Saint Egreve FR,Grenoble Cedex FR,Grenoble Cedex FR,Grenoble Cedex FR

国籍：FR,FR,FR,FR

代理机构：Vedder Price PC

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