您的当前位置：首页 Method and system for improving the efficiency of

Method and system for improving the efficiency of

来源：筏尚旅游网

专利内容由知识产权出版社提供

专利名称：Method and system for improving the

efficiency of a mechanical alignment tool

发明人：Uwe Knappe,Jan Raebiger,Uwe Schulze,Rolf

Seltmann

申请号：US10621663申请日：20030717公开号：US069411B2公开日：20050920

专利附图：

摘要：A technique is disclosed that allows alignment of substrates on a run-to-runbasis by using the position data of one or more previously aligned substrates to

determine a setpoint of a pre-alignment process for one or more subsequent substrates.The setpoint may also be determined on the basis of a predefined characteristic of thesubstrates to be aligned.

申请人：Uwe Knappe,Jan Raebiger,Uwe Schulze,Rolf Seltmann

地址：Niemtsch DE,Dresden DE,Dresden DE,Dresden DE

国籍：DE,DE,DE,DE

代理机构：Williams, Morgan & Amerson, P.C.

更多信息请下载全文后查看

因篇幅问题不能全部显示，请点此查看更多更全内容

查看全文