专利名称:Method and system for improving the
efficiency of a mechanical alignment tool
发明人:Uwe Knappe,Jan Raebiger,Uwe Schulze,Rolf
Seltmann
申请号:US10621663申请日:20030717公开号:US069411B2公开日:20050920
专利附图:
摘要:A technique is disclosed that allows alignment of substrates on a run-to-runbasis by using the position data of one or more previously aligned substrates to
determine a setpoint of a pre-alignment process for one or more subsequent substrates.The setpoint may also be determined on the basis of a predefined characteristic of thesubstrates to be aligned.
申请人:Uwe Knappe,Jan Raebiger,Uwe Schulze,Rolf Seltmann
地址:Niemtsch DE,Dresden DE,Dresden DE,Dresden DE
国籍:DE,DE,DE,DE
代理机构:Williams, Morgan & Amerson, P.C.
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