专利名称：Heating stage
发明人：Toru Odagaki,Yoichi Mizukawa申请号：US11090031申请日：20050328
公开号：US20050213951A1公开日：20050929
专利附图：
摘要：A heating stage according to the present invention comprises a flat stageportion on which a work piece is placed, a glass section having cylindrical portion in whichtwo or more lamps are disposed as a heating unit, and a metal section having a cylindricalportion and a bottom portion forming an inner space by fixing the metal section and the
glass section integrally wherein the inner space is under reduced pressure, and inert gasis filled.
申请人：Toru Odagaki,Yoichi Mizukawa
地址：Hyogo JP,Hyogo JP
国籍：JP,JP
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