专利名称：Waveguide structures
发明人：James A. Walker,Howard R. Stuart申请号：US09495126申请日：20000201公开号：US070130B1公开日：20021022
专利附图：
摘要：A waveguide for optical transmission having a mechanically active core materialcomprised of a silicon-rich silicon nitride in a mechanically active region. In the
mechanically active region, the silicon-rich silicon nitride core can have no cladding (ie. anair cladding) or a cladding comprised of a silicon nitride over at least a portion thereof.
The silicon-rich silicon nitride core is comprised of a silicon nitride compound having aratio of silicon to nitrogen atoms greater than that of stoichiometric silicon nitride, SiN.
申请人：AGERE SYSTEMS GUARDIAN CORP.
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