Device for loading and unloading substrates

专利名称：Device for loading and unloading substrates发明人：GODOT, ERWAN,VERAN, EMMANUELLE申请号：EP091594.5申请日：20090703公开号：EP2144285A3公开日：20131023

专利附图：

摘要：The device i.e. mobile load lock (5) has leak proof walls comprising an orifice (2)with a connection unit to equipment e.g. transfer chamber (3) and processing chamber (1).An orifice (9) has a connection unit to a wafer transport case (8) i.e. Front Opening UnifiedPod. A movement unit moves the basket to the case. An orifice (6) has a connection unit

to equipment chosen between an equipment front end module (7) and the chamber (3).Wedges and placement arms place and support the wafers in a position and cooperatewith a scoop for passage of wedges and arms via orifice (9) or orifice (6).

申请人：ADIXEN VACUUM PRODUCTS

地址：98, Avenue de Brogny 74000 Annecy FR

国籍：FR

代理机构：Croonenbroek, Thomas Jakob

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