专利名称：Method and apparatus for particle removal发明人：Justin K. Brask申请号：US10421557申请日：20030421
公开号：US20040206732A1公开日：20041021
专利附图：
摘要：Numerous embodiments of method and apparatus for particle removal aredisclosed. In one embodiment, an apparatus for particle removal comprises a lasersource and a substrate with a surface, the substrate having a layer of liquid partiallycovering the top surface, and at least one particle on the substrate surface, the laser
source configured to deliver one or more laser pulses to the substrate surface proximateto the at least one particle, at an angle of incidence that is acute with respect to thesubstrate surface.
申请人：BRASK JUSTIN K.
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