专利名称:THIN FILM GETTER DEVICES
发明人:Ian Michael Sturland,Tracey Anne Hawke申请号:US12159828申请日:20071128
公开号:US20090081434A1公开日:20090326
专利附图:
摘要:Improved thin film getter devices () comprise a layer () of getter materialdeposited on a substrate (). The layer has a main portion () and a cap portion (), whichforms an external surface of the device. The cap portion has a lower specific area than themain portion.
申请人:Ian Michael Sturland,Tracey Anne Hawke
地址:Bristol GB,Bristol GB
国籍:GB,GB
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